Publication | Closed Access
Processing influence on the reliability of platinum thin films for MEMS applications
20
Citations
8
References
2002
Year
Materials ScienceMaterial AnalysisEngineeringMicrofabricationSurface ScienceApplied PhysicsMems ApplicationsPlatinum Thin FilmsThin Film Process TechnologyElectronic PackagingThin FilmsMicroelectronicsThin Film ProcessingMicro-electromechanical SystemDevice Reliability
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