Fraunhofer-Publica (Fraunhofer-Gesellschaft) · 2014 · 12 citations · 8 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor DevicesSemiconductor MaterialsChemical Vapor DepositionPhotovoltaic DevicesPhotovoltaic MaterialsSolar Cell MaterialsSolar CellsSolar Photovoltaic SystemsAtmospheric Pressure Chemical Vapor DepositionCapacitance-voltage CharacteristicsCapacitance-voltage MeasurementsElectrochemical MeasurementsHeterojunction Solar CellsSecondary Ion Mass SpectrometrySolar Cell Fabrication
We present co-diffused bifacial n-type solar cells (CoBiN) with peak efficiencies of 19.9 %. The codiffusion process is based on a high temperature step in an atmosphere containing POCl3 and a BSG/SiOx layer stack deposited by atmospheric pressure chemical vapor deposition. Secondary ion mass spectroscopy measurements show that the reaction of POCl3 with the SiOx layer results in the formation of a PSG layer converting a fraction of the SiOx layer. Electrochemical capacitance voltage measurements do not detect an influence of POCl3 on the boron emitter.
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