Fast optical 3D form measurement of aspheres including determination of thickness and wedge and decenter errors

Abstract

A method for non-contact 3D form testing of aspheric surfaces including determination of decenter and wedge errors and lens thickness is presented. The principle is based on the absolute measurement capability of multi-wavelength interferometry (MWLI). The approach produces high density 3D shape information and geometric parameters at high accuracy in short measurement times. The system allows inspection of aspheres without restrictions in terms of spherical departures, of segmented and discontinuous optics. The optics can be polished or ground and made of opaque or transparent materials.