Bending and expanding motion actuators

Design considerations for micromachined electric actuators

Stephen F. Bart, T.A. Lober, Roger T. Howe et al. · Sensors and Actuators · 1988 · 136 citations

Electrical Engineering, Engineering, Microfabrication +6

Flexible microactuator for miniature robots

Koichi Suzumori, S. Iikura, Hirohisa Tanaka · 2002 · 132 citations

Robotic Systems, Engineering, New Type +20

Preparation and Switching Kinetics of Pb(Zr, Ti)O₃ Thin Films Deposited by Reactive Sputtering

Takashi Hase, Tadashi Shiosaki · Japanese Journal of Applied Physics · 1991 · 93 citations

Materials Science, Semiconductors, Engineering +12

Integrated force arrays

Stephen M. Bobbio, M. Kellam, Bruce W. Dudley et al. · 2002 · 49 citations

Engineering, Flexible Metallized Membranes, Mechanical Engineering +16

Distributed electrostatic micro actuator

M. Yamaguchi, S. Kawamura, Kazuyuki MINAMI et al. · 2002 · 42 citations

Engineering, Mechanical Engineering, Electrostatic Force +17