X-ray microscopy

Abstract

Developments in microscopy using soft X-rays (energies between about 100 eV and 2 keV) over the last ten years or so are reviewed. The main advances have been in intense sources, principally synchrotron radiation and plasma sources and in X-ray optical components such as grazing incidence reflectors, multilayer mirrors and zone plates. The different types of X-ray microscopy are described and images obtained are compared with those from the much better established techniques of electron and optical microscopy. Finally, prospects for the future are discussed.