Thickness-dependent phase evolution and dielectric property of Hf0.5Zr0.5O2 thin films prepared with aqueous precursor

Yong Yan, Dayu Zhou, Chunxia Guo, Jin Xu, Xirui Yang, Hailong Liang, Fangyang Zhou, Shichao Chu, Xiaoying Liu

Journal of Sol-Gel Science and Technology · 2015 · 18 citations · 29 references

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