Vacuum · 2015 · 63 citations · 42 references
Materials ScienceDeposition GasesEngineeringOxide ElectronicsSurface ScienceApplied PhysicsCondensed Matter PhysicsGallium OxideSubstrate PlanesThin FilmsChemical DepositionChemical Vapor DepositionThin Film ProcessingVarious Phases
42
Oxygen vacancies and donor impurities in β-Ga2O3
Joel B. Varley, J. R. Weber, Anderson Janotti et al. · Applied Physics Letters · 2010 · 985 citations
Deep-ultraviolet transparent conductive β-Ga2O3 thin films
Masahiro Orita, Hiromichi Ohta, Masahiro Hirano et al. · Applied Physics Letters · 2000 · 977 citations