Nanoporous Ultra‐Low‐κ Films Prepared from Fluorinated Polyimide with Grafted Poly(acrylic acid) Side Chains

Abstract

Thermal decomposition of labile poly(acrylic acid) (PAAc) side chains grafted onto fluorinated polyimide backbones (see Figure) is used to prepare nanoporous ultra‐low‐κ fluorinated polyimide films. The dielectric constant of the nanoporous fluorinated polyimide film can be varied by altering the graft concentration of the labile side chains.