Influence of anionic polyelectrolyte addition on ceria dispersion behavior for quartz chemical mechanical polishing

Chemical processes in glass polishing

Lee M. Cook · Journal of Non-Crystalline Solids · 1990 · 989 citations

Natural Sciences, Chemistry, Materials Science +11

Self‐Assembly of ZnO Nanorods and Nanosheets into Hollow Microhemispheres and Microspheres

Maosong Mo, Jimmy C. Yu, Liqiang Zhang et al. · Advanced Materials · 2005 · 401 citations

Natural Sciences, Chemistry, Materials Science +17

Ceria concentration effect on chemical mechanical polishing of optical glass

Liangyong Wang, Kailiang Zhang, Zhitang Song et al. · Applied Surface Science · 2006 · 136 citations

Natural Sciences, Materials Engineering, Materials Science +13

Laser writing techniques for photomask fabrication using a femtosecond laser

Krishnan Venkatakrishnan, B. K. A. Ngoi, P. Stanley et al. · Applied Physics A · 2002 · 60 citations

Engineering, Electrical Engineering, Manufacturing Engineering +14

Effect of abrasive particle concentration on preliminary chemical mechanical polishing of glass substrate

Zefang Zhang, Weili Liu, Zhitang Song · Microelectronic Engineering · 2010 · 44 citations

Engineering, Materials Engineering, Materials Science +14