Demonstration of a monolithic multichannel module for multi-Gb/s intra-MCM optical interconnects

Guy Verschaffelt, Ryszard Buczyński, Patrik Tuteleers, Pedro Vynck, Valérie Baukens, Heidi Ottevaere, Christof Debaes, Stefan Küfner, M. Küfner, Jan Genoe,

IEEE Photonics Technology Letters · 1998 · 12 citations · 2 references

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Abstract

In this letter, we report on the demonstration of a 2.48-Gb/s multichannel optical data-link for intramultichip module interconnects. The optical module was fabricated in polymethylmethacrylate (PMMA) by deep proton lithography and monolithically integrates micromirrors and cylindrical lenses. With the same technology, we have also fabricated a single-channel optical bridge and used this component to demonstrate a proof-of-principle optical intrachip interconnect by establishing a digital data-link between optoelectronic transceivers integrated on the same chip.

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