Comparative Studies of Ultra Low-κ Porous Silica Films with 2-D Hexagonal and Disordered Pore Structures

Nobutoshi Fujii, Kazuhiro Yamada, Yoshiaki Oku, Nobuhiro Hata, Yutaka Seino, Chie Negoro, Takamaro Kikkawa

MRS Proceedings · 2004 · 21 citations · 6 references

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