Oxidation behavior of AlN in the presence of oxide and glass for thick film applications

Abstract

The effect of oxides and oxide glasses on the oxidation of AlN powder and substrate was studied by thermogravimetric analysis, supplemented by XRD, optical microscopy, and EPMA. The oxidation behavior of powder mixtures of AlN and oxides or glass frits in air was dependent on the oxide species. Oxides were divided into three groups: PbO, CuO, and Bi/sub 2/O/sub 3/ promoted the oxidation drastically, ZnO and MgO enhanced the oxidation slightly, and B/sub 2/O/sub 3/ retarded the oxidation of AlN. SiO/sub 2/ and Al/sub 2/O/sub 3/ had no influence on the oxidation. Also reported is a study of the interactions between the AlN substrate and PbO-containing glasses.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">&gt;</ETX>