New force measurement and micro grasping method using laser Raman spectrophotometer

Abstract

Force measurement of the micro objects is very important for micromanipulation. For high accuracy, stiffness of the finger tip can be reduced for force measurement. It is not suitable for manipulation. So we consider to evaluate the stress on the micro structure to measure the force. Force measurement based on stress information has advantages when the structure is miniaturized. This can be shown by the scaling analysis. Hence, we propose a new force measurement and micromanipulation method using the laser Raman spectrophotometer (LRS). We design a micro gripper that employs the proposing force measurement method. We show experimental results of force measurement with the analytical evaluation to explain the effectiveness of the proposed system.