Au-assisted electroless etching of silicon in aqueous HF/H2O2 solution - Concepedia

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Au-assisted electroless etching of silicon in aqueous HF/H2O2 solution

59

Citations

15

References

2009

Year

Nacéra Megouda, Toufik Hadjersi, Gaëlle Piret, Rabah Boukherroub, Omar Elkechai

Applied Surface Science

Materials ScienceChemical EngineeringEngineeringMicrofabricationSurface ScienceAu-assisted Electroless EtchingSemiconductor Device FabricationSilicon On InsulatorMicroelectronicsPlasma Etching

References

	Year	Citations

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