Dynamic Calibration of a Shear-Stress Sensor Using Stokes-Layer Excitation

Abstract

The design and implementation of a novel dynamic calibration technique for shear-stress sensors is presented. This technique uses the oscillating wall shear stress generated by a traveling acoustic wave as a known input to the shear-stresssensor.Asilicon-micromachined, eoating-element shear-stresssensorhasbeen dynamicallycalibrated up to 4 kHz using this method. These data represent the e rst broadband, experimental verie cation of the dynamic response of a shear-stress sensor.