Universal threshold for the steam laser cleaning of submicron spherical particles from silicon - Concepedia

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Publication | Open Access

Universal threshold for the steam laser cleaning of submicron spherical particles from silicon

DOI Full Paper Access

62

Citations

0

References

2000

Year

M. Mosbacher, V. Dobler, Johannes Boneberg, P. Leǐderer

Applied Physics A

Submicron Spherical ParticlesAdvanced Laser ProcessingEngineeringPhysicsMicrofabricationOptical PropertiesLaser-induced BreakdownApplied PhysicsLaser ApplicationsLaser AblationLaser Processing TechnologyUniversal ThresholdLaser-assisted DepositionSteam Laser CleaningHigh-power Lasers

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