Concepedia
Vacuum · 1989 · 33 citations · 2 references
EngineeringMaterials EngineeringMaterials ScienceMicrofabricationNanotechnologyMems ActuatorsMicromachiningCluster Ion FormationFocused Ion Beam Machining
2
188. Atomic and ionic impact phenomena on metal surfaces
Vacuum · 1966 · 156 citations
Natural Sciences, Materials Science, Physics +14
Energetic cluster impacts on thin gold and tantalum films
M.W. Matthew, R. J. Beuhler, Myron C. Ledbetter et al. · The Journal of Physical Chemistry · 1986 · 33 citations
Natural Sciences, Chemistry, Materials Science +7