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Deposition of aluminum-doped zinc oxide films by RF magnetron sputtering and study of their structural, electrical and optical properties

Materials ScienceMagnetismMaterials EngineeringEngineeringNanoelectronicsOptical PropertiesOxide ElectronicsApplied PhysicsAluminum-doped ZincRf Magnetron SputteringThin Film Process TechnologyThin FilmsPulsed Laser DepositionChemical DepositionThin Film Processing