Advanced Materials · 2002 · 111 citations · 0 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsMicrofabricationSemiconductor DevicesNanoimprint LithographyPolymer ProcessingPolymer Thin FilmsSoft LithographyThin Film LithographyThin-film PatterningLithographic Surface PatterningPatterning Of Polymer Thin Films
The direct patterning of functional semiconducting polymers (see Figure) has been achieved with a nanoimprint lithography technique. The room-temperature process described is time-saving as repeated temperature cycling is not required. In addition, due to the direct patterning approach the need for further processing steps (plasma treatment) to pattern the underlying semiconducting material is eliminated.