The influence of operating parameters on pulsed D.C. magnetron sputtering plasma - Concepedia

Concepedia

Publication | Open Access

The influence of operating parameters on pulsed D.C. magnetron sputtering plasma

DOI Full Paper Access

15

Citations

12

References

2010

Year

Sreejith Karthikeyan, Arthur E. Hill, John Cowpe, Richard D. Pilkington

Electrical EngineeringEngineeringPlasma ScienceOperating ParametersPlasma PhysicsPlasma ConfinementGas Discharge PlasmaPulsed D.c. MagnetronPlasma Application

References

	Year	Citations

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