Electronic Properties and Device Applications of Hot-Wire CVD Polycrystalline Silicon Films - Concepedia

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Electronic Properties and Device Applications of Hot-Wire CVD Polycrystalline Silicon Films

16

Citations

6

References

1997

Year

A. R. Middya, J. Guillet, R. Brenot, J. Perrin, J.E. Bourée, Christophe Longeaud, Jean‐Paul Kleider

MRS Proceedings

Materials ScienceElectrical EngineeringEngineeringDevice ApplicationsSemiconducting PolymerApplied PhysicsThin Film Process TechnologyElectronic PropertiesThin FilmsElectronic PackagingChemical Vapor DepositionSilicon On InsulatorThin Film Processing

References

	Year	Citations

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