Arrays of self-sealed microchambers and channels

Abstract

Arrays of self-sealed structures have been grown on silicon mesas and lines, which consist of porous thin film centres enclosed by solid borders, and can be fabricated in a single step using a unique method of film growth called glancing angle deposition (GLAD). These specialized structures may have potential for use in microreactor, microfluidic, chromatographic, nano-assay, lab-on-a-chip, biochemical, and other related applications.