Local annealing of complex mechanical devices: a new approach for developing monolithic micro-devices - Concepedia

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Local annealing of complex mechanical devices: a new approach for developing monolithic micro-devices

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74

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0

References

1999

Year

Yves Bellouard, Thomas Lehnert, J.‐E. Bidaux, Thomas C. Sidler, Reymond Clavel, R. Gotthardt

Materials Science and Engineering A

Materials ScienceWafer Scale ProcessingEngineeringComplex Mechanical DevicesMicrofabricationMechanical EngineeringMonolithic Micro-devicesFabrication TechniqueLocal AnnealingMicroscale SystemMicro-electromechanical SystemMicroelectronicsMicrostructureMicrofluidics

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