Optical Engineering · 2007 · 13 citations · 9 references
Natural SciencesElectrical EngineeringDigital ImagingOpticsDigital Signal ProcessingImagingInterferometryOptical MetrologyHeterodyne InterferometryInterferometric ImagingInterferometric MeasurementInterferometric MetrologyOptical Interferometry
An area scan digital camera is used to record the full-field heterodyne interference signals, and the processes to derive the associated phases from the data of the recorded frames under a convenient condition are described. By calculating the possible errors under several different cases, an optimal condition to get better results is proposed.
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Optical heterodyne profilometry
Gary E. Sommargren · Applied Optics · 1981 · 246 citations
Natural Sciences, Physics, Optics +16
Heterodyne profiling instrument for the angstrom region
Dan Pantzer, J. Politch, Leif Ek · Applied Optics · 1986 · 47 citations