Cr-doped DLC films in three mid-frequency dual-magnetron power modes

Reactive magnetron sputtering of thin films: present status and trends

J. Musil, Pavel Baroch, J. Vlček et al. · Thin Solid Films · 2004 · 396 citations

Natural Sciences, Materials Science, Physics +16

Time-resolved Langmuir probe measurements at the substrate position in a pulsed mid-frequency DC magnetron plasma

James W. Bradley, H. Bäcker, Peter Kelly et al. · Surface and Coatings Technology · 2001 · 136 citations · Full text

Natural Sciences, Electrical Engineering, Physics +9

Recent developments in pulsed magnetron sputtering

Robert Arnell, Peter Kelly, J. W. Bradley · Surface and Coatings Technology · 2004 · 105 citations

Natural Sciences, Materials Science, Physics +10

A study of the tribological behaviour of three carbon-based coatings, tested in air, water and oil environments at high loads

J. Stallard, D. Mercs, M. Jarratt et al. · Surface and Coatings Technology · 2003 · 89 citations

Engineering, Materials Engineering, Materials Science +17

TwinMag II: Improving an advanced sputtering tool

U Heister, J. Krempel-Hesse, J. Szczyrbowski et al. · Vacuum · 2000 · 19 citations

Natural Sciences, Materials Engineering, Materials Science +7