Atomic Layer Deposition of SnO₂for Selective Room Temperature Low ppb Level O₃Sensing

Abstract

This work demonstrates ultra-low power ozone sensors for real time, continuous, and portable monitoring. Atomic Layer Deposition (ALD) of SnO2 enables precise control of ultrathin film thickness on the order of the Debye length to enhance sensitivity at room temperature. Correlation between ozone concentration and the rate of resistance change is used to maintain fast response times and ultraviolet (UV) illumination hastens recovery. ALD SnO2 ultrathin film sensors realize room temperature operation with highly selective detection of 50 ppb ozone with average power consumption of 150 μW making them well suited for real time, portable environmental monitoring systems.