Focused ion beam/lift-out transmission electron microscopy cross sections of block copolymer films ordered on silicon substrates - Concepedia

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Focused ion beam/lift-out transmission electron microscopy cross sections of block copolymer films ordered on silicon substrates

51

Citations

47

References

2001

Year

I.H. White, Yong‐Jin Pu, Miriam Rafailovich, Jonathan Sokolov, Alexander H. King, Lucille A. Giannuzzi, C.A. Urbanik-Shannon, B.W. Kempshall, Adi Eisenberg, S. A. Schwarz,

Materials ScienceBlock Co-polymersEngineeringElectron-beam LithographyBeam LithographyMicrofabricationMicroscopyNanotechnologySurface ScienceApplied PhysicsScanning Probe MicroscopySilicon SubstratesNanolithography MethodBlock Copolymer Films

References

	Year	Citations

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