Computer simulation of two-component target sputtering

Sputtering studies with the Monte Carlo Program TRIM.SP

J.P. Biersack, W. Eckstein · Applied Physics A · 1984 · 909 citations

Computational Science, Engineering, Physics +5

Tridyn — A TRIM simulation code including dynamic composition changes

W. Möller, W. Eckstein · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1984 · 637 citations

Engineering, Model Synthesis, Dynamic Composition Changes +5

Sputtering of multicomponent materials: Elements of a theory

Peter Sigmund, A. Oliva, G. Falcone · Nuclear Instruments and Methods in Physics Research · 1982 · 225 citations

Materials Engineering, Materials Science, Engineering +5

Mass effects on angular distribution of sputtered atoms

R. R. Olson, M. King, G. K. Wehner · Journal of Applied Physics · 1979 · 109 citations

Engineering, Physics, Mass Effects +11

Evolve, a time-dependent monte carlo code to simulate the effects of ion-beam-induced atomic mixing

M.L. Roush, T.D. Andreadis, O.F. Goktepe · Radiation Effects · 1981 · 97 citations

Preferential Sputtering, Ion Implantation, Engineering +10