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Optical, electrical and structural characteristics of Al:ZnO thin films with various thicknesses deposited by DC sputtering at room temperature and annealed in air or vacuum

Materials ScienceMaterials EngineeringRoom TemperatureOptical MaterialsStructural CharacteristicsEngineeringAluminium NitrideOptical PropertiesOxide ElectronicsApplied PhysicsVacuum DeviceThin FilmsOptoelectronicsZno Thin FilmsThin Film Processing