IEEE Electron Device Letters · 1995 · 20 citations · 4 references
EngineeringMaterials EngineeringMaterials ScienceOptical MaterialsOptoelectronicsPhotonicsDetector TechnologyInfrared DetectorsInfrared Optical MaterialsOptical DetectorsPhotodetectorsSemiconductor DetectorsComplementary Metal-oxide-semiconductor Detector SensitivityComplementary Metal-oxide-semiconductor DetectorsInfrared OpticsInfrared PhotodetectorsSchottky Barrier DetectorsSilicon Infrared DetectorsUniformity AnalysisWavelength Sensitivity
PtSi Schottky infrared detectors with extended cutoff wavelengths of 5.7, 6.6, and 7.3 μm have been demonstrated by incorporating a thin p+ layer at the PtSi-Si interface for high sensitivity medium wavelength infrared imaging applications. The response uniformity of the 7-μm cutoff detector was studied.
4