A system for semiconductor process specification

Abstract

The SPEC system for capturing and managing semiconductor fabrication process information is discussed. The SPEC data model decomposes process specifications into equipment, step, process, and flow hierarchies. Mechanisms within an interactive graphical user interface provide a high degree of user control over the expression and organization of objects within each layered hierarchy and control the information in terms of collection, propagation to other layers, and the appearance of the data within specification folders using a what you see is what you get (WYSIWYG) folder builder. Implementation on a concurrent object-oriented database permits simultaneous use of the SPEC system by many users.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">&gt;</ETX>