Lab on a Chip · 2008 · 316 citations · 14 references
EngineeringMaterials EngineeringMaterials ScienceMicroelectromechanical SystemsMicrofabricationThin FilmsMicrofabrication ProcessesMicrofluidic Device FabricationMicrofluidic DevicesMicrofluidic SystemsMicrofluidicsSoft LithographyChemical ResistanceInterfacial PropertiesMicrochannel FabricationMicrofluidic Channel FabricationMicrofluidic FabricationMicrofluidic MaterialsPolydimethylsiloxane Device FabricationRobustness
Soft lithography using polydimethylsiloxane (PDMS) allows one to fabricate complex microfluidic devices easily and at low cost. However, PDMS swells in the presence of many organic solvents significantly degrading the performance of the device. We present a method to coat PDMS channels with a glass-like layer using sol-gel chemistry. This coating greatly increases chemical resistance of the channels; moreover, it can be functionalized with a wide range of chemicals to precisely control interfacial properties. This method combines the ease of fabrication afforded by soft-lithography with the precision control and chemical robustness afforded by glass.
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Microfluidic consecutive flow-focusing droplet generators
Minseok Seo, Chantal Paquet, Zhihong Nie et al. · Soft Matter · 2007 · 255 citations