Scaling Limitations for Flexural Beams Used in Electromechanical Devices

Abstract

Limitations for the miniaturization of flexural beams used in electromechanical devices are examined using the numerical analysis of the Euler-Bernoulli equation. The utilization of structural materials with high strain limit, in conjunction with innovations in processes and structures, will be needed to scale nanoelectromechanical systems beam lengths into the sub-100 nanometer regime.