Microfabrication of Ceramics by Filling of Photoresist Molds

Abstract

Filling of photo-resist molds is a new method for the generation of micropatterned ceramic surfaces. A flat substrate is first patterned with a photoresist. The ceramic coating is then applied to the substrates by pouring 50 vol.-% alumina suspension over the mold, excess material being removed with a polymer blade (see Figure). Alumina structures of high quality were produced on silicon wafers and on sapphire single crystals.