MRS Proceedings · 1993 · 20 citations · 32 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor MaterialsThin FilmsEpitaxial GrowthSemiconductor SurfacesSemiconductor Thin FilmsSilicon MaterialsThin-film DepositionThin-film MaterialsAtomic Layer EpitaxyEpitaxial Film GrowthSiliconSilicon DioxideSilicon EpitaxyThin-film Growth Mechanisms
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Epitaxial growth of CeO2 layers on silicon
Tomoyasu Inoue, Y. Yamamoto, S. Koyama et al. · Applied Physics Letters · 1990 · 266 citations