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Efficient statistical capacitance extraction of nanometer interconnects considering the on-chip line edge roughness

Electrical EngineeringWafer Scale ProcessingEngineeringAdvanced Packaging (Semiconductors)Physical Design (Electronics)MicrofabricationNanoelectronicsSurface ScienceComputer EngineeringChip AttachmentElectronic PackagingMicroelectronicsInterconnect (Integrated Circuits)Nanometer Interconnects