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An in situ electrical measurement technique via a conducting diamond tip for nanoindentation in silicon

Materials ScienceDiamond-like CarbonElectrical EngineeringEngineeringMicrofabricationNanotechnologyNanoelectronicsApplied PhysicsDiamond TipNano Electro Mechanical SystemSemiconductor Device FabricationNanometrologySilicon On Insulator