Depth resolution in sputter profiling

Interdiffusion between GaAs and AlAs

L.L. Chang, A. Koma · Applied Physics Letters · 1976 · 206 citations

Engineering, Materials Engineering, Materials Science +17

Auger study of preferred sputtering on binary alloy surfaces

Paul S. Ho, John E. Lewis, H. Wildman et al. · Surface Science · 1976 · 200 citations

Natural Sciences, Materials Engineering, Materials Science +14

Evaluation of concentration-depth profiles by sputtering in SIMS and AES

S. Hofmann · Applied Physics A · 1976 · 159 citations

Natural Sciences, Materials Engineering, Materials Science +6

Theoretical and experimental aspects of secondary ion mass spectrometry

H. W. Werner · Vacuum · 1974 · 123 citations

Natural Sciences, Chemistry, Analytical Chemistry +9

Deconvolution method for composition profiling by Auger sputtering technique

Paul S. Ho, John E. Lewis · Surface Science · 1976 · 98 citations

Engineering, Materials Engineering, Elemental Analysis +10