Solid-State Electronics · 2000 · 187 citations · 5 references
EngineeringComputer EngineeringElectrical EngineeringElectronic MaterialsMicroelectronicsSemiconductor DevicesDevice CharacterizationDevice ModelingDevice ReliabilityDevice ScalingNanoelectronicsSemiconductor ReliabilityDevice Scaling EffectsGate Oxide DegradationGate Oxide ScalingGate Oxide Thickness EffectsLeakage Current ModelingLeakage Current ReductionScaling Effects In Cmos
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Tungsten Gate Technology for Quarter-Micron Application
H. Noda, Hideyuki Sakiyama, Yasushi Goto et al. · Japanese Journal of Applied Physics · 1996 · 14 citations