The role of plasma induced substrate heating during high rate deposition of microcrystalline silicon solar cells - Concepedia

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The role of plasma induced substrate heating during high rate deposition of microcrystalline silicon solar cells

33

Citations

21

References

2006

Year

M.N. van den Donker, R. Schmitz, W. Appenzeller, B. Rech, W. M. M. Kessels, M. C. M. van de Sanden

Thin Solid Films

Materials ScienceHigh Rate DepositionElectrical EngineeringSubstrate HeatingEngineeringMicrofabricationApplied PhysicsChemical Vapor DepositionSolar CellsPlasma ProcessingPhotovoltaics

References

	Year	Citations

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