Simple planar structure for high-performance AlInAs avalanche photodiodes

Abstract

We demonstrate a high-performance AlInAs avalanche photodiode (APD) based on a novel planar diode concept. The APD features a simple planar structure without a guardring, which simplifies production making it more like a PIN photodiode process. Measured device characteristics designed for 10-Gb/s use were a dark current of 0.16 μA, responsivity of 0.88 A/W, and a gain-bandwidth product of 120 GHz. Reliability was guaranteed by an aging test exceeding 2400 h, whose conditions were a reverse dark current of 100 μA at 175/spl deg/C. These features and performance indicate that the AlInAs APD is highly practical.