A low-power low-phase-noise LC VCO with MEMS Cu inductors

Hsiao‐Chin Chen, Chao-Heng Chien, Hung‐Wei Chiu, Shey‐Shi Lu, Kung-Neng Chang, Kun-Yu Chen, Shihao Chen

IEEE Microwave and Wireless Components Letters · 2005 · 23 citations · 5 references

Concepts

Abstract

A 2-3 GHz CMOS inductance-capacitance (LC) voltage-controlled oscillator (VCO) integrated with high-Q micro-electromechanical systems (MEMS) Cu inductors is reported. While dissipating only 6.3 mW, a phase noise of -121 dBc/Hz at 600 kHz offset from 2.78 GHz carrier is achieved. This MEMS VCO has the largest power-frequency normalized figure-of-merit (12.5 dB) among the Si bipolar and CMOS LC VCOs.

References

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