2003 · 114 citations · 5 references
EngineeringComputer EngineeringOptoelectronicsSystem-on-chip DesignIntegrated Circuit DesignLayout DesignLayout EvaluationLayout OptimizationPhysical DesignVery-large-scale Integration LayoutLayout Optimization AlgorithmsLayout Optimization EvaluationLayout TechniquesOptical LithographyPost-layout OptimizationResolution EnhancementResolution Enhancement Techniques
This tutorial introduces the reader to the basic concepts of optical lithography, derives fundamental resolution limits, reviews the challenges facing future technology nodes, explains the principles of resolution enhancement techniques and their impact on chip layout, and discusses layout optimization considerations.
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