Conventional thermal annealing for a more efficient p-type doping of Al<sup>+</sup> implanted 4H-SiC - Concepedia

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Conventional thermal annealing for a more efficient p-type doping of Al<sup>+</sup> implanted 4H-SiC

44

Citations

17

References

2012

Year

Roberta Nipoti, Raffaele Scaburri, Anders Hallén, A. Parisini

Journal of materials research/Pratt's guide to venture capital sources

Materials EngineeringMaterials ScienceElectrical EngineeringSemiconductor TechnologyEngineeringApplied PhysicsEfficient P-type DopingSemiconductor Device FabricationMicroelectronicsCarbideSemiconductor Device

References

	Year	Citations

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