Sensors and Actuators A Physical · 2003 · 36 citations · 10 references
Natural SciencesElectrical EngineeringMaterials ScienceElectronic MaterialsSensorsThin FilmsSemiconductor Thin FilmsStrain MeasurementStrain SensorsThin Film Electrical PropertiesThin-film DepositionThin-film MaterialsElectrical Resistance Strain GaugesResistorsSensingStrain Gauge SensorsStrain SensingStrain-sensing MaterialsThin-film SensorsThin-film Strain Gauges
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