Atomic imaging and modeling of passivation, functionalization, and atomic layer deposition nucleation of the SiGe(001) surface via H2O2(g) and trimethylaluminum dosing

Tobin Kaufman-Osborn, Evgueni Chagarov, Sang Wook Park, Bhagawan Sahu, Shariq Siddiqui, Andrew C. Kummel

Surface Science · 2014 · 18 citations · 35 references

Concepts

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