Design of a Microwave Microplasma Source at Atmospheric Pressure

Abstract

This paper studies two linear resonator sources, which use a continuous 2.45-GHz microwave excitation to produce stable microplasmas, in air and in argon, at atmospheric pressure. The discharges are produced and sustained within the 50-200-mum gap created between two metal electrodes with either 6 or 14 mm in length. Particular attention is given to the design and optimization of the sources (in terms of frequency tuning and power coupling), following a complementary approach based on simulations and experiments. Optical-emission-spectroscopy diagnostics allow one to deduce the rotational, vibrational, and excitation gas temperatures and the electron density (using Stark broadening measurements of the H <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">beta</sub> line-emission profile).