Planar wafer transport and positioning on an air film using a viscous traction principle

A conveyance system using air flow based on the concept of distributed micro motion systems

Satoshi Konishi, Hiroyuki Fujita · Journal of Microelectromechanical Systems · 1994 · 180 citations

Engineering, Mechanical Engineering, Mechatronics Engineering +12

Discharge coefficients of orifice-type restrictor for aerostatic bearings

G. Belforte, Terenziano Raparelli, Vladimir Viktorov et al. · Tribology International · 2006 · 166 citations

Engineering, Aerospace Engineering, Aerodynamics +9

Characteristics of flow through small sharp-edged cylindrical orifices

K. Ramamurthi, K. Nandakumar · Flow Measurement and Instrumentation · 1999 · 118 citations

Engineering, Chemical Engineering, Flow Visualization +11

Air Film System for Handling Semiconductor Wafers

J. A. Paivanas, Jehangir Hassan · IBM Journal of Research and Development · 1979 · 44 citations

Engineering, Manufacturing Engineering, Mechanical Engineering +16