2004 · 25 citations · 0 references
EngineeringMechanical EngineeringMechatronics EngineeringActuatorsNanotechnologyVibrationKinematic ControlMotion ControlPiezoelectric ActuationPiezoelectric ActuatorsPiezoelectric MaterialsVibration ControlActive ControlControl AlgorithmsNanoactuatorsNanopositioningNanopositioning SystemsPiezoelectric Vibration ControlTrajectory Following ControlVibration Suppression In Drilling
This paper reports on recent advancements in piezo-driven nanopositioning technology, parallel metrology, parallel kinematics, active trajectory control, and covers new control algorithms for vibration suppression and tracking error elimination and their benefits for the user.