Investigation of piezoelectric driven MEMS mirrors based on single and double S-shaped PZT actuator for 2-D scanning applications - Concepedia

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Investigation of piezoelectric driven MEMS mirrors based on single and double S-shaped PZT actuator for 2-D scanning applications

30

Citations

50

References

2012

Year

Kah How Koh, Takeshi Kobayashi, Chengkuo Lee

Sensors and Actuators A Physical

EngineeringMicrofabricationPiezoelectric NanogeneratorsMechanical Engineering2-D Scanning ApplicationsPiezoelectricityPiezoelectric MaterialMicroelectronicsMems MirrorsMicro-electromechanical SystemMicromachined Ultrasonic Transducer

References

	Year	Citations

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